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The SHX portfolio of inline, ultra-high purity heaters by Process Technology is designed to safely heat IPA and low flash-point solvents, meeting the most stringent cleanliness requirements to support next-generation semiconductor node technologies. Explosion proof (EX) versions available.
CLEVELAND - PennZone -- WILLOUGHBY, OHIO – Process Technology, a leading manufacturer of inline, ultra-high purity heaters for the semiconductor industry, is excited to announce its new family of SHX and SHX-EX heaters for IPA and flammable solvents. This new line of low internal volume heaters is integral to ultra-high purity (UHP) solvent heating applications used for semiconductor manufacturing, including wafer cleaning, etching, and photoresist stripping processes.
"Safely heating IPA and low flash-point solvents is paramount in our unique design." States Doreen Langa, Sr. Product Manager. "Our patented purge system, indirect heating, and low watt density provide multi-level assurances for safe operation. Explosion-proof certification is also available."
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SHX's advanced cleanliness design features a compact, indirect, ultra-pure, inline flow path - free of contact with O-rings. Patented purge technology eliminates risks associated with high-temperature fluid permeation and offers the assurance of immediate leak discovery.
Additional product specifications:
Process Technology, established in 1978, serves Semiconductor, Flat Panel Display (FPD), Microelectromechanical (MEMS), Nanotechnology, Photovoltaic (PV, solar cell), Liquid Crystal Display (LCD), Biomedical, and Pharmaceutical industries. Products include LUFRAN™ DI water heaters, chemical heaters, quartz heaters, fluoropolymer heaters, electric immersion heaters, heat exchangers, high-temperature filter chambers, solvent heaters, nitrogen heaters, Dynatronix™ Power Supplies, and customized to your tool heater designs. Semi S2/S3 and CE compliant; ETL/UL and NRTL certified. ISO 9001:2008, including design.
"Safely heating IPA and low flash-point solvents is paramount in our unique design." States Doreen Langa, Sr. Product Manager. "Our patented purge system, indirect heating, and low watt density provide multi-level assurances for safe operation. Explosion-proof certification is also available."
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SHX's advanced cleanliness design features a compact, indirect, ultra-pure, inline flow path - free of contact with O-rings. Patented purge technology eliminates risks associated with high-temperature fluid permeation and offers the assurance of immediate leak discovery.
Additional product specifications:
- Temperature: up to 90°C (194°F).
- Pressure: up to 475 kPa (69 PSI).
- Wattages: SHX 3kW, 6kW, 9kW, and 12 kW.
SHX-EX 3kw and 6kw. - Voltages: 200-480V in single or three-phase.
- Certifications: SHX - UL 499 & CE (pending)
SHX-EX - UL 499 & CE (pending), ATEX II 2 G Ex db IIA TA Gb (pending),
SEMI S2/S3 (pending).
Process Technology, established in 1978, serves Semiconductor, Flat Panel Display (FPD), Microelectromechanical (MEMS), Nanotechnology, Photovoltaic (PV, solar cell), Liquid Crystal Display (LCD), Biomedical, and Pharmaceutical industries. Products include LUFRAN™ DI water heaters, chemical heaters, quartz heaters, fluoropolymer heaters, electric immersion heaters, heat exchangers, high-temperature filter chambers, solvent heaters, nitrogen heaters, Dynatronix™ Power Supplies, and customized to your tool heater designs. Semi S2/S3 and CE compliant; ETL/UL and NRTL certified. ISO 9001:2008, including design.
Source: Process Technology
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