The PennZone

CLEVELAND - PennZone -- WILLOUGHBY, OHIO – Process Technology, a leading manufacturer of inline, ultra-high purity heaters for the semiconductor industry, is excited to announce its new family of SHX and SHX-EX heaters for IPA and flammable solvents. This new line of low internal volume heaters is integral to ultra-high purity (UHP) solvent heating applications used for semiconductor manufacturing, including wafer cleaning, etching, and photoresist stripping processes.

"Safely heating IPA and low flash-point solvents is paramount in our unique design." States Doreen Langa, Sr. Product Manager. "Our patented purge system, indirect heating, and low watt density provide multi-level assurances for safe operation. Explosion-proof certification is also available."

More on The PennZone

• Bisnar Chase Named 2026 Law Firm of the Year by Best Lawyers
• Ace Industries Welcomes Jack Polish as Controller
• Senseeker Machining Company Acquires Axis Machine to Establish Machining Capability for Improved Supply Chain Control and Shorter Delivery Times
• VC Fast Pitch Is Coming to Maryland on March 26th
• Patent Bar Exam Candidates Achieve 30% Higher Pass Rates with Wysebridge's 2026 Platform

SHX's advanced cleanliness design features a compact, indirect, ultra-pure, inline flow path - free of contact with O-rings. Patented purge technology eliminates risks associated with high-temperature fluid permeation and offers the assurance of immediate leak discovery.

Additional product specifications:

• Temperature: up to 90°C (194°F).
• Pressure: up to 475 kPa (69 PSI).
• Wattages: SHX 3kW, 6kW, 9kW, and 12 kW.
  SHX-EX 3kw and 6kw.
• Voltages: 200-480V in single or three-phase.
• Certifications: SHX - UL 499 & CE (pending)
  SHX-EX - UL 499 & CE (pending), ATEX II 2 G Ex db IIA TA Gb (pending),
  SEMI S2/S3 (pending).

Engineered to meet the highest performance, cleanliness, and safety standards; The SHX heater family is an optimal heating solution. Class 100 cleanroom assembled.
Process Technology, established in 1978, serves Semiconductor, Flat Panel Display (FPD), Microelectromechanical (MEMS), Nanotechnology, Photovoltaic (PV, solar cell), Liquid Crystal Display (LCD), Biomedical, and Pharmaceutical industries. Products include LUFRAN™ DI water heaters, chemical heaters, quartz heaters, fluoropolymer heaters, electric immersion heaters, heat exchangers, high-temperature filter chambers, solvent heaters, nitrogen heaters, Dynatronix™ Power Supplies, and customized to your tool heater designs. Semi S2/S3 and CE compliant; ETL/UL and NRTL certified. ISO 9001:2008, including design.